The working principle of the high vacuum ionization gauge is to utilize the ionization phenomenon of gas under high vacuum conditions. It consists of an ionization chamber and an electron collector. When gas molecules enter the ionization chamber, they are ionized by methods such as heating wires or electron beams to produce positive ions and free electrons. The positive ions are attracted to the electron collector by the electric field force, and the free electrons are accelerated and cause an electric current to flow.
By measuring the magnitude of the current in the ionization chamber, the density of the gas molecules and the degree of vacuum can be inferred. Generally speaking, the density of gas molecules is positively related to the current. Therefore, when the current increases, it means the vacuum degree is low; conversely, when the current decreases, it means the vacuum degree is high.
Measuring range
- Use high voltage and large-sized ionization chamber when measuring low pressure;
- When measuring high pressure, use a low voltage, small size ionization chamber.
Measuring range 0.1~10^-8 Pa
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