Structural Parameter Table:
| Structural | Value |
| Material Options | Ceramic plated Gold/Stainless Steel/Molybdenum |
| Rod diameter | 2-16mm |
| Rod Length | 100-300mm |
| Base | Alumina Ceramic/Machinable Glass Ceramic |
| Comprehensive accuracy | ≤3μm |
99% Alumina Ceramic Material Properties
| Type | Unit | Standard | Value |
| Color | - | - | Ivory |
| Main Characteristics | - | - | Excellent plasma corrosion resistance, high wear resistance. |
| Application Field | - | - | Semiconductor equipment components, wear-resistant and corrosion-resistant parts. |
| Density | g/cm3 | ISO18754:2003 | 3.88 |
| Water Imbibition | % | - | 0 |
| Vickers Hardness | HV | ASTM-C1327-15 | 17 |
| Bending Strength | MPa | ASTM-C1161-13 | 350 |
| Compressive Strength | MPa | GB/T8489-2006 | 2450 |
| Young's Modulus | GPa | ASTM-C1198-09 | 350 |
| Poisson's Ratio | - | ASTM-C1421-18 | 0.22 |
| Fracture Toughness | MPa·m1/2 | ASTM-C1421-18 | 4-5 |
| Linear Coefficient of Expansion (40-400°C) | x10-6/°C | ASTM-E1461-13 | 8.2 |
| Thermal Conductivity (20°C) | W/(m·k) | ASTM-E1461-13 | 25-30 |
| Specific Heat | J/(kg·k)x103 | ASTM-E1461-13 | 0.8 |
| Volume Resistivity (20°C) | Ω·cm | - | >1015 |
| Dielectric Strength | KV/mm | - | 20 |
| Dielectric Constant | - | ASTM-D2149-13 | 9.2 |
| Dielectric Loss Coefficient | x10-4 | ASTM-D2149-13 | 2 |
| Nitric Acid (HNO3) (90°C) | Weight Loss | - | <0.12 |
| Sulfuric Acid (H2SO4) (95°C) | - | <0.3 | |
| Sodium Hydroxide (NaOH) (80°C) | - | <0.9 | |
| Max Using Temperature | °C | - | 1500 |
Benefits：
- Custom Specifications
- Superior Surface Treatment Technology
- High Accuracy Installation, 3um Comprehensive Tolerance
- Consistent Process Management
- High-Purity Alumina Ceramic Collars
- High-Quality Chamber and Accessory Integration
Declaration: This is an original article of INNOVACERA®. Please indicate the source link when reprinting: https://www.innovacera.com/product/quadrupole-mass-filter
Frequently Asked Questions
Why Are 3um Tolerances and Ceramic Bases Critical in Quadrupole Mass Filters? How Do They Prevent Mass Peak Drift?
In quadrupole mass spectrometry, micro-scale rod misalignment or thermal expansion severely distorts the oscillating RF/DC hyperbolic electric field, leading to peak broadening, transmission loss, and mass calibration drift. INNOVACERA’s quadrupole mass filters achieve a comprehensive assembly accuracy of <= 3 µm. By mounting rods onto 99% alumina or machinable glass ceramic bases with volume resistivity >10^15 Ω·cm and low thermal expansion, they ensure perfect electrode parallelism and eliminate thermal drift in ultra-high vacuum environments.
Need Hyperbolic or Cylindrical Rods for Mass Spectrometers? How to Order Custom Quadrupole Assemblies from a Qualified Manufacturer?
INNOVACERA is an advanced engineering ceramic and mass spectrometer component manufacturer offering fully tailored quadrupole filters. Customers can specify rod diameters (2–16 mm), lengths (100–300 mm), and material configurations—including gold-plated ceramic rods, molybdenum, or precision-ground stainless steel. Simply share your ion trajectory simulation parameters, mechanical chamber constraints, and RF operating frequencies to receive high-precision assemblies validated by comprehensive CMM testing.
